Growth and characterization of Si-doped Ga2O3 thin films by remote plasma atomic layer deposition: Toward UVC-LED application
Xiao-Ying Zhang, Yue Yang, Wei-Hang Fan, Chen Wang, Wan […]
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Xiao-Ying Zhang, Yue Yang, Wei-Hang Fan, Chen Wang, Wan […]
Catherine Langpoklakpam, An-Chen Liu, Kuo-Hsiung Chu, L
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