Improved Modulation Bandwidth of Blue Mini-LEDs by Atomic-Layer Deposition Sidewall Passivation

Shou-Qiang Lai

Ting-Wei Lu

Su-Hui Lin

Yi Lin

Guo-Chun Lin

Jian-Hua Pan

Yue-Long Zhuang

Yi-Jun Lu

Yue Lin

Hao-Chung Kuo

Zhong Chen

Ting-Zhu Wu

IEEE Transactions on Electron Devices , 69(9), 4936 (2022)

出版日期

July 21, 2022

摘要

By adopting atomic layer deposition (ALD) sidewall passivation, the electroluminescence (EL) and communication performances of mini-light emitting diodes (mini-LEDs) of different sizes were improved. In particular, the most significant improvement in the electroluminescence properties of the external quantum efficiency (EQE) (a 7.2% increase), leakage current, and the communication properties of the modulation bandwidth (a 20% increase) transmission rate and bit error rate (BER) was found in the smallest mini-LEDs (80 μm× 120 μm ). According to the results of time-resolved photoluminescence (TRPL) measurements, the carrier lifetime of the samples can be affected by both the size and ALD sidewall passivation. In addition, the effects of ALD sidewall passivation for visible-light communication (VLC) were demonstrated.

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