Yu-Ming Huang, Chun-Yen Peng, Wen-Chien Miao, Hsin Chiang, Tzu-Yi Lee, Yun-Han Chang, Konthoujam James Singh, Z. Daisuke Iida, Ray-Hua Horng, Chi-Wai Chow, Chien-Chung Lin, Kazuhiro Ohkawa, Shih-Chen Chen, and Hao-Chung Kuo
Photonics Research , 10(8), 1978 (2022) — Published in July 2022
ABSTRACT
In this study, we present a high-efficiency InGaN red micro-LED fabricated by the incorporation of superlattice structure, atomic layer deposition passivation, and a distributed Bragg reflector, exhibiting maximum external quantum efficiency of 5.02% with a low efficiency droop corresponding to an injection current density of 112 A/cm2112 A/cm2. The fast carrier dynamics in the InGaN is characterized by using time-resolved photoluminescence, which is correlated to a high modulation bandwidth of 271 MHz achieved by a 6×6× 25-μm-sized micro-LED array with a data transmission rate of 350 Mbit/s at a high injection current density of 2000 A/cm22000 A/cm2. It holds great promise for full-color micro-displays as well as high-speed visible light communication applications based on monolithic InGaN micro-LED technologies.